JPH0624837Y2 - ペリクル収納容器 - Google Patents
ペリクル収納容器Info
- Publication number
- JPH0624837Y2 JPH0624837Y2 JP1988045727U JP4572788U JPH0624837Y2 JP H0624837 Y2 JPH0624837 Y2 JP H0624837Y2 JP 1988045727 U JP1988045727 U JP 1988045727U JP 4572788 U JP4572788 U JP 4572788U JP H0624837 Y2 JPH0624837 Y2 JP H0624837Y2
- Authority
- JP
- Japan
- Prior art keywords
- support frame
- pellicle
- attached
- case
- flexible sheet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000003860 storage Methods 0.000 title claims description 10
- 239000000853 adhesive Substances 0.000 claims description 17
- 230000001070 adhesive effect Effects 0.000 claims description 17
- 239000000463 material Substances 0.000 claims description 6
- 239000000428 dust Substances 0.000 description 11
- 239000004820 Pressure-sensitive adhesive Substances 0.000 description 5
- -1 polypropylene, ethylene-vinyl acetate Polymers 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 238000002788 crimping Methods 0.000 description 3
- 239000004033 plastic Substances 0.000 description 3
- 229920003023 plastic Polymers 0.000 description 3
- 239000004698 Polyethylene Substances 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229920000573 polyethylene Polymers 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Natural products C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 229920002301 cellulose acetate Polymers 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000005038 ethylene vinyl acetate Substances 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
Landscapes
- Packages (AREA)
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988045727U JPH0624837Y2 (ja) | 1988-04-06 | 1988-04-06 | ペリクル収納容器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988045727U JPH0624837Y2 (ja) | 1988-04-06 | 1988-04-06 | ペリクル収納容器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01149646U JPH01149646U (en]) | 1989-10-17 |
| JPH0624837Y2 true JPH0624837Y2 (ja) | 1994-06-29 |
Family
ID=31272027
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988045727U Expired - Lifetime JPH0624837Y2 (ja) | 1988-04-06 | 1988-04-06 | ペリクル収納容器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0624837Y2 (en]) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5209423B2 (ja) * | 2008-09-11 | 2013-06-12 | 旭化成イーマテリアルズ株式会社 | ペリクル梱包構造体 |
| US9504544B2 (en) | 2012-04-27 | 2016-11-29 | 3M Innovative Properties Company | Container for orthodontic appliances |
| KR20240148395A (ko) * | 2022-03-22 | 2024-10-11 | 미쯔이가가꾸가부시끼가이샤 | 펠리클 포장체 및 펠리클 수용체 |
-
1988
- 1988-04-06 JP JP1988045727U patent/JPH0624837Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01149646U (en]) | 1989-10-17 |
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